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自动光学检测系统
设备名称:自动光学检测系统
商品编号:T00473
制造商:平田机工(Hirata)
型号:WLS8000
晶圆尺寸:12寸(300mm)
自动光学检测系统 WLS8000:Configuration 、System Composition
Configuration:Laser microscope Olympus(OLS3000)
1、Light source:Light source semiconductor laser
2、Scanning method:XY Integrated scanner
3、Detection system:Circular pinhole + Photo multiplier
4、Z drive:Revolver (up/down)、Moving resolution 0.01μm、Built-in scale (Resolution 5nm)、Stroke 10mm、Coarse motion manual Z stage(For alignment)、With fine movement handle、Stroke 70mm(Further adjustable head position by +30 mm)
5、Auto focus:Laser reflection type、Main specifications for "OLS3000"
Light source device(LG-PS2):
1、Rating:AC100-120V/AC200-240V 3.0A/1.8A 50/60Hz
2、Lamp:Halogen lamp(With dichroic mirror)
3、Lamp type:JCR12V-100WB(Made by USHIO)
4、Method for adjusting light quantity:Voltage adjustment type
5、Color temperature:3100K(When maximum light amount)
6、Cooling method:Forced air cooling
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